Furnaces and OvensThin Film DepositionGlove Boxes

Thin Film Deposition  TEMPS UP TO 600°C
                                              


V/IG Series™
Vacuum/Inert Gas Oven

It’s intelligent in its versatility.
The T-M Vacuum V/IG Series oven offers a high-quality, compact, yet versatile vacuum oven at a economical price. With temperature capabilities ranging from ambient to 600°C, and incorpor-ating any degree of vacuum environment from atmosphere to 10-8 torr, the V/IG Series oven offers a wealth of possibilities.

The V/IG Series oven chamber is a Hot Wall design, which allows full utilization of the inside of the vacuum chamber, maximizing the load capacity. With up to a 4" thick, high-temperature insulation with a reflective shield surrounding its heater bank, the oven maintains a stable processing temperature inside the chamber at
all times. The V/IG Series vacuum oven offers standard inert gas fill and vent valves allowing for various types of part processing using a gas back-fill environment.

A convenient modular design, the V/IG Series oven incorporates a removable back plate to accommodate an optional double door modifi-cation. This enables easy connection and interface with other processing equipment, such as either end of an inert gas environment (glove box) system for pass through applications.

The T-M Vacuum V/IG Series oven features several standard models with many options available, making it simple to control your process and its cost. Add the automated control package and create automatic processing cycles which enable an operator to simply load the oven, then push the cycle start button!

Temperature Capabilities

  • 03 Series: 350°C
  • 06 Series: 600°C

Time to temperature**:
25 minutes under vacuum
35 minutes in atmosphere

Vacuum Pumping Systems

Several options available:

  • Basic 7, 11 or 23.3 cfm two-stage mechanical pump packages all with a valve, pump start switch and 0-1000 micron vacuum gauge installed
  • Upgraded pumping systems: Mechanical, dry, diffusion, cryogenic, and turbo-molecular
  • Mechanically refrigerated, optically dense cold trap in roughing line or Liquid nitrogen trap in high vacuum line (for prevention of hydrocarbon contamination)
  • Automated control system with heat control and backfill

Vacuum Ranges**
Mechanical Pump, Standard atmosphere to 1.0 X 10-2 torr
Dry Pump (oil free) atmosphere to 1.0 X 10-4 torr
Mechanical/Diffusion Pumps atmosphere to 1.0 X 10-6 torr
Mechanical/Cryo Pumps atmosphere to 1.0 X 10-7 torr
Mechanical/Turbo Pumps atmosphere to 1.0 X 10-7torr

Operating Pressure Range**

  • Atmosphere to 10-8 torr
  • Working pressure at maximum temperature: 10-8 torr to 1 atmosphere

System Controls

  • +/- 1 degree controllability
  • Programmable digital set point temperature control
  • Independent Programmable digital over-temperature control
  • 0-30" HG dial display vacuum gauge
  • Heat on/off switch
  • Optional Automated Control System available: Controls heat, vacuum, and backfill using both PLC and digital temp-erature control technology to allow for event programmable temperature ramp & soak profiles and automated vacuum and backfill cycles
  • Optional PanelView™ operator interface panel affords access to temperature profile programs and all system parameters. With its multiple user-friendly screens, it eliminates the need for separate programmers, controllers and message displays
  • Optional full PC/PLC automation control with recipe management and data acquisi-tion
    collection
  • Multiple ovens governed by a single point control center available as an optio

Inert Gas System

Standard inert gas inlet and vent valve for gas processing applications such as backfill and venting

Available:
Closed-loop, multi-channel upstream gas flow control with downstream pressure control

Chamber

  • All-stainless steel construction
    Optional second door on opposite side for pass thru capabilities such as attachment to a dry/ glove box and/or to any other controlled environment enclosure
  • Special shelving arrangement option available
  • Optional water cooling of vacuum chamber walls for quick cooling

Available work zones*


Model#

Work Zone Size
Internal
Volume (ft3)
800 Series 11.5" Dia x 14" Deep 0.84
  11.5" Dia x 18 " Deep 1.08
  11.5" Dia x 30" Deep 1.80
 
900 Series 13.5" Dia x 22" Deep 1.82
  13.5" Dia x 34" Deep 2.81
 
1200 Series 17" Dia x 24" Deep 3.15
  17" Dia x 34" Deep 4.46

Cylindrical Hot Wall chamber configuration consists of insulated resistive heater bank attached to the exterior of the chamber

  • Working pressure: Atmosphere to 10-8 torr**

Exterior

Chamber and controls are enclosed in a mild steel epoxy, enamel covered enclosure

  • All models available in clean room compatible configurations or in all-stainless steel enclosures

Safety features
All T-M Vacuum Products, Inc. products are equipped with standard safety features to ensure safe operation.

Please consult T-M Vacuum Products, Inc. at (856) 829-2000 for availability and pricing of these or any other option requirements.

*All times and pressures are for clean, dry, empty, out-gassed furnace, starting from ambient pressure and temperature, and may vary. Times and pressures subject to pump size and maximum temperature.

   Download Product Sheet

V/IG Single and Multi-Oven Stations

Shown at top and above:
V/IG multi-oven station
and V/IG single oven station

































V/IG HotZone
The V/IG all-stainless steel
chamber interior configured
for multiple shelving units.











































V/IG Control Panel
The PanelView™ operator
interface affords access to
temperature profile programs
and all system parameters.


T-M Vacuum Products, Inc. | TEL: (856) 829-2000 | | FAX: (856) 829-0990
630 S. Warrington St. | P.O. Box 2248 | Cinnaminson, NJ 08077