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Thin Film Deposition  TEMPS UP TO 600°C
                                              


Vacu Bake ™
Vacuum Inert Gas Oven

It’s versatile, yet still economical.
The T-M Vacuum Vacu-Bake oven series offers a high quality and versatile vacuum oven at an economical price.

With temperature capabilities ranging from ambient to 600°C, and capable of incorporating any degree of vacuum environment from atmosphere to 10-8 torr, the Vacu-Bake oven offers a wealth of possibilities.

The Vacu-Bake oven chamber is a Hot Wall design, which allows full utilization of the inside of the vacuum chamber, maximizing the load capacity. With up to a 4" thick, high-temperature insulation with reflective shield surrounding its heater bank, the oven maintains a stable processing temperature inside the chamber at all times. The Vacu-Bake series vacuum oven offers standard electro-pneumatic inert gas fill and vent valves allowing for various types of part processing using a gas back-filled environment.

The T-M Vacuum Vacu-Bake oven series comes standard with an automated control package so you can simply load the oven and press the start button! With many options available such as gas stirring fans, quick cool, alternate pumping packages and HMI control systems, the Vacu-Bake makes it simple for you to control your process and its cost!

Temperature Capabilities

4 series    400°C (752°F)
6 series    600°C (1112°F)

Time to temperature*: 25 minutes under vacuum

Vacuum Pumping System

 23.3 cfm two-stage mechanical pump (42.2
   cfm on 48" x 48" chamber)

Available:

-Upgraded pumping systems: Mechanical, dry, diffusion, cryogenic, and turbo-molecular

-Molecular Sieve or Mechanically refrigerated, optically-dense, cold trap in roughing line or liquid nitrogen cryo-trap in high-vacuum line (for prevention of hydrocarbon contamination)

Vacuum Ranges*

Mechanical Pump, Standard atmosphere to 1.0 X 10-2 torr
Dry Pump (oil free) atmosphere to 1.0 X 10-4torr
Mechanical/Diffusion Pumps atmosphere to 1.0 X 10-6 torr
Mechanical/Cryo Pumps atmosphere to 1.0 X 10-7 torr
Mechanical/Turbo Pumps atmosphere to 1.0 X 10-7 torr

System Controls

  • Automated Control System: Controls heat, vacuum, and backfill using both PLC and
    digital temperature control technology to allow for event programmable temperature
    ramp & soak profiles and automated vacuum and backfill cycles
  • +/- 1 degree controllability
    Independent programmable digital over-temperature control
  • 0-30" HG dial display vacuum gauge

Available:

- PanelView™ operator interface panel affords access to temperature profile programs and all system parameters. With its multiple user-friendly screens, it eliminates the need for separate programmers, controllers and message displays

- Multiple-survey thermocouples

- Full PC/PLC automation control with recipe management and data acquisition collection

Operating Pressure Range*

  • Atmosphere to 10-8 torr
  • Working pressure at maximum temperature: 10-8 torr to 1 atmosphere

Inert Gas System

  • Standard electro-pneumatic inert gas inlet and vent valve for gas processing applications such as backfill and venting

Available:

  • .5 to 5 HP stirring fan for more rapid heating and cooling
  • Closed-loop, multi-channel upstream gas flow control with downstream pressure control

Chamber

  • All-stainless steel construction
  • Special shelving arrangement available
  • Optional water-cooling of vacuum chamber walls for quick cooling

Available work zones*
                                                     Internal
 Model#       Work Zone Size    Volume (ft3)


H18 series   18" Dia x 30" Deep         4.42
H24 series   24" Dia x 30" Deep         7.85
H30 series   30" Dia x 48" Deep       19.63
H42 series   42" Dia x 48" Deep       38.47
H48 series   48" Dia x 48" Deep       50.30

  • Cylindrical Hot Wall chamber configuration consists of insulated resistive heater bank attached to the exterior of the chamber
  • Working pressure: Atmosphere to 10-8 torr*
  • Chamber and controls are enclosed in a mild steel epoxy painted enclosure

Safety features
All T-M Vacuum Products, Inc. products are equipped with standard safety features to ensure safe operation.

Please consult T-M Vacuum Products, Inc. at (856) 829-2000 for availability and pricing of these or any other option requirements.

*All times and pressures are for clean, dry, empty, out-gassed furnace, starting from ambient pressure and temperature, and may vary. Times and pressures subject to pump size and maximum temperature.

   Download Product Sheet

Vacu Bake H-4804

The Vacu-Bake H-4804 with
optional multiple shelves.




Vacu Bake with Stirring Fan
The Vacu-Bake H-4804
with stirring fan option.




























Vacu Bake Control Panel
The Vacu-Bake's
Automatic Control Package.

































T-M Vacuum Products, Inc. | TEL: (856) 829-2000 | | FAX: (856) 829-0990
630 S. Warrington St. | P.O. Box 2248 | Cinnaminson, NJ 08077