Parts and Service

Parts and Services Support Includes:

• Essential spare parts kits for furnaces, ovens, custom equipment – expendable, consumable parts and custom fabrications
• Hot Zone Packages – New installation ready Hot Zones, Hot Zone rebuild services, Hot Zone liner parts package
• Furnace system inspection / evaluation services
• Service inspection and PM service contracts
• Technical training
• Technical documentation packages
• Refurbishment services – controls retrofit upgrade packages, diffusion pump system upgrades, heat exchangers, cold traps, valving and manifold upgrades
• Standard and custom right angle high vacuum poppet valves, 2″ – 36″, and up